The Application of MEMS Technology for Adaptive Optics in Vision Science, IEEE Journal of Selected Topics in Quantum Electronics, vol.10, issue.3, pp.629-635, 2004. ,
DOI : 10.1109/JSTQE.2004.829202
The Possibility of Compensating Astronomical Seeing, Publications of the Astronomical Society of the Pacific, vol.65, pp.229-236, 1953. ,
DOI : 10.1086/126606
Technology and applications of micromachined silicon adaptive mirrors, Optical Engineering, vol.36, issue.5, pp.1382-1390, 1997. ,
DOI : 10.1117/1.601334
Optical MEMS for adaptive optics applications, 21st Meet, pp.12-17, 2002. ,
Novel micromachined membrane mirror characterization and closed-loop demonstration, Optics Communications, vol.200, issue.1-6, pp.99-105, 2001. ,
DOI : 10.1016/S0030-4018(01)01629-7
A membrane mirror with transparent electrode for adaptive optics, Proc. SPIE MOEMS and Miniaturized Syst. V, pp.155-166, 2005. ,
Segmented silicon-micromachined microelectromechanical deformable mirrors for adaptive optics, IEEE Journal of Selected Topics in Quantum Electronics, vol.8, issue.1, pp.33-45, 2002. ,
DOI : 10.1109/2944.991397
Advanced wavefront correction technology for the next generation of adaptive optics equipped ophthalmic instrumentation, Ophthalmic Technologies XV, pp.125-132, 2005. ,
DOI : 10.1117/12.590824
Gimbal-Less Monolithic Silicon Actuators for Tip???Tilt???Piston Micromirror Applications, IEEE Journal of Selected Topics in Quantum Electronics, vol.10, issue.3, pp.462-471, 2004. ,
DOI : 10.1109/JSTQE.2004.829205
Adaptive Optics Engineering Handbook, 1999. ,
DOI : 10.1201/9780203908686
Electrostatic micromechanical actuator with extended range of travel, Journal of Microelectromechanical Systems, vol.9, issue.3, pp.321-328, 2000. ,
DOI : 10.1109/84.870058
Charge control of parallel-plate, electrostatic actuators and the tip-in instability, Journal of Microelectromechanical Systems, vol.12, issue.5, pp.656-671, 2003. ,
DOI : 10.1109/JMEMS.2003.818455
Analysis of closed-loop control of parallel-plate electrostatic microgrippers, Proceedings of the 1994 IEEE International Conference on Robotics and Automation, pp.820-825, 1994. ,
DOI : 10.1109/ROBOT.1994.351387
Capacitive stabilization of an electrostatic actuator: output feedback viewpoint, Proceedings of the 2003 American Control Conference, 2003., pp.4053-4058, 2003. ,
DOI : 10.1109/ACC.2003.1240470
Control Issues for MEMS, 42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475), pp.3039-3047, 2003. ,
DOI : 10.1109/CDC.2003.1273090
On the control of an electromagnetic actuator of valve positionning on a camless engine, Proc. AVEC 04, 2004. ,
Flatness and defect of non-linear systems: introductory theory and examples, International Journal of Control, vol.4, issue.6, pp.1327-1361, 1995. ,
DOI : 10.1109/9.73561
A Lie-Backlund approach to equivalence and flatness of nonlinear systems, IEEE Transactions on Automatic Control, vol.44, issue.5, pp.922-937, 1999. ,
DOI : 10.1109/9.763209
Theory of Oscillators, 1987. ,
Feedback Stabilization of Nonlinear Systems: Sufficient Conditions and Lyapunov and Input-output Techniques, Trends in Control, pp.293-347, 1995. ,
DOI : 10.1007/978-1-4471-3061-1_10
Voltage and pull-in time in current drive of electrostatic actuators, Journal of Microelectromechanical Systems, vol.11, issue.3, pp.196-205, 2002. ,
DOI : 10.1109/JMEMS.2002.1007398
Nonlinear Control Systems, 1995. ,
Segmented deformable micromirror for free-space optical communication, Int. Conf. Optical MEMS and Their Applicat, pp.197-198, 2002. ,