Skip to Main content Skip to Navigation
Journal articles

Characterization of the adhesion of thin film by Cross-Sectional Nanoindentation. Analysis of the substrate edge chipping and the film delamination

Abstract : Cross-Sectional Nanoindentation (CSN) is a recent method for adhesion measurement of nanoscale thin films in Ultra-Large Scale Integrated circuits. In the case of ductile thin films, the motion of the substrate chip implies significant plastic deformation of the film and complex geometry of delaminated areas. This article recalls first the experimental procedure and the two main features observed in this test performed on various plane copper films deposited on silicon: the critical force producing silicon edge chipping increases linearly with the distance of the indenter to the interface; on the section the delaminated length of the film (a - b) is proportional to the residual silicon chip displacement uf and the ratio S = uf / (a - b) depends on the manufacturing process of the film, and is so related to its adhesion to the substrate. One proposes a simple analysis of the silicon edge chipping. Then a model of pull-off of an elastic-strain hardening plastic film is developed, which suggests an explanation for the delamination process. Application of the model to experimental results starting from films plastic properties deduced from nanoindentation measurements provides plausible results. Some improvements for performing the CSN test are proposed in order to make easier its interpretation.
Document type :
Journal articles
Complete list of metadata

https://hal-mines-paristech.archives-ouvertes.fr/hal-00612429
Contributor : Magalie Prudon <>
Submitted on : Friday, July 29, 2011 - 9:10:35 AM
Last modification on : Thursday, September 24, 2020 - 5:22:54 PM

Identifiers

Citation

Eric Felder, Sébastien Roy, Evelyne Darque-Ceretti. Characterization of the adhesion of thin film by Cross-Sectional Nanoindentation. Analysis of the substrate edge chipping and the film delamination. Comptes Rendus Mécanique, Elsevier Masson, 2011, 339 (7-8), pp.443-457. ⟨10.1016/j.crme.2011.05.003⟩. ⟨hal-00612429⟩

Share

Metrics

Record views

185