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Conference papers

Nanostructural investigation of boron carbide thin films grown by DC magnetron sputtering

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https://hal-mines-paristech.archives-ouvertes.fr/hal-00815997
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Submitted on : Friday, April 19, 2013 - 3:54:15 PM
Last modification on : Thursday, September 24, 2020 - 6:30:04 PM

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  • HAL Id : hal-00815997, version 1

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Tolga Tavsanoglu, Marie-Hélène Berger, Michel Jeandin, O. Addemir. Nanostructural investigation of boron carbide thin films grown by DC magnetron sputtering. Proceedings of the twenty sixth international conference on surface modification technologies, Jun 2012, Ecully, France. pp.183-189. ⟨hal-00815997⟩

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