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Simulation Of Fib Sem Images For Analysis Of Porous Microstructures

Abstract : Focused ion beam nanotomography-scanning electron microscopy tomography yields high-quality three-dimensional images of materials microstructures at the nanometer scale combining serial sectioning using a focused ion beam with SEM. However, FIB-SEM tomography of highly porous media leads to shine-through artifacts preventing automatic segmentation of the solid component. We simulate the SEM process in order to generate synthetic FIB-SEM image data for developing and validating segmentation methods. Monte-Carlo techniques yield accurate results, but are too slow for the simulation of FIB-SEM tomography requiring hundreds of SEM images for one dataset alone. Nevertheless, a quasi-analytic description of the specimen and various acceleration techniques, including a track compression algorithm and an acceleration for the simulation of secondary electrons, cut down the computing time by orders of magnitude, allowing for the first time to simulate FIB-SEM tomography.
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https://hal-mines-paristech.archives-ouvertes.fr/hal-00879573
Contributor : François Willot <>
Submitted on : Monday, November 4, 2013 - 12:02:00 PM
Last modification on : Thursday, September 24, 2020 - 4:38:04 PM

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  • HAL Id : hal-00879573, version 1

Citation

Torben Prill, Katja Schladitz. Simulation Of Fib Sem Images For Analysis Of Porous Microstructures. Scanning, Wiley-Blackwell: No OnlineOpen, 2013, 35 (3), pp.189-195. ⟨hal-00879573⟩

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