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Conference papers

Anisotropy Measurement of Periodic Structures

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Contributor : Gildas Guillemot Connect in order to contact the contributor
Submitted on : Monday, January 30, 2017 - 2:34:45 PM
Last modification on : Wednesday, November 17, 2021 - 12:28:21 PM


  • HAL Id : hal-01449419, version 1


Gildas Guillemot, Zahra Khawaja, Maxence Bigerelle. Anisotropy Measurement of Periodic Structures. International Conference on Surface Metrology, ICSM’2012, Mar 2012, Annecy-Mont Blanc, France. ⟨hal-01449419⟩



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