https://hal-mines-paristech.archives-ouvertes.fr/hal-01721379 Contributor : Karim InalConnect in order to contact the contributor Submitted on : Friday, March 2, 2018 - 9:25:37 AM Last modification on : Wednesday, November 17, 2021 - 12:28:27 PM
Catheline Cazako, Karim Inal, Alain Burr, Frédéric Georgi. The impact of nitrogen plasma treatments on SixNyHz moisture sensitivity. Conference on Plasma Based Ion Implantation & Deposition, Oct 2017, Shanghai, France. ⟨hal-01721379⟩