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The impact of nitrogen plasma treatments on SixNyHz moisture sensitivity

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https://hal-mines-paristech.archives-ouvertes.fr/hal-01721379
Contributor : Karim Inal <>
Submitted on : Friday, March 2, 2018 - 9:25:37 AM
Last modification on : Thursday, September 24, 2020 - 5:22:58 PM

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  • HAL Id : hal-01721379, version 1

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Catheline Cazako, Karim Inal, Alain Burr, Frédéric Georgi. The impact of nitrogen plasma treatments on SixNyHz moisture sensitivity. Conference on Plasma Based Ion Implantation & Deposition, Oct 2017, Shanghai, France. ⟨hal-01721379⟩

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