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Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element

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https://hal-mines-paristech.archives-ouvertes.fr/hal-01804151
Contributor : Stéphanie Brunet <>
Submitted on : Thursday, May 31, 2018 - 2:15:44 PM
Last modification on : Thursday, September 24, 2020 - 5:00:03 PM

Identifiers

  • HAL Id : hal-01804151, version 1

Citation

Fabrice Casset, Lion Cadix, Perceval Coudrain, Alexis Farcy, L.L. Chapelon, et al.. Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element . United States, Patent n° : US2012074527. 2012. ⟨hal-01804151⟩

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