Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element

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https://hal-mines-paristech.archives-ouvertes.fr/hal-01804151
Contributeur : Stéphanie Brunet <>
Soumis le : jeudi 31 mai 2018 - 14:15:44
Dernière modification le : lundi 25 février 2019 - 16:34:20

Identifiants

  • HAL Id : hal-01804151, version 1

Citation

Fabrice Casset, Lion Cadix, Perceval Coudrain, Alexis Farcy, L.L. Chapelon, et al.. Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element . United States, Patent n° : US2012074527. 2012. ⟨hal-01804151⟩

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