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hal-00492754v1  Journal articles
Guchuan ZhuJean LévineLaurent PralyYves-Alain Peter. Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: A Simulation Study
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2006, 15 (5), pp.1165--1174. ⟨10.1109/JMEMS.2006.880198⟩